Current position: Home >> Scientific Research >> Paper Publications

Research on Ti-Si-N films prepared by magnetron sputtering

Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 2012-01-01

Journal: RARE METALS

Volume: 31

Issue: 2

Page Number: 182-187

Prev One:Ti-Si-N films prepared by magnetron sputtering

Next One:Influence of boron contents on the structure and hardness properties of Al-Mg-B films by R.F. magnetron sputtering