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AlN/GaN/自持金刚石结构SAW器件及制备方法

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First Author:Qin Fuwen

Disigner of the Invention:baiyizhen,zhangdong,John Wu,Jiming Bian

Application Number:CN201110062224.1

Authorization Date:2011-03-16

Authorization number:CN102185583A

Pre One:石墨烯改性图形化金属衬底上的氮化镓基薄膜及制备方法
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