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微纳米高通量标准化工艺技术与装备

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Leading Scientist:Mingshan Zhao

Supported by:国家“863”项目

Status:结题

Supported by:科学技术部高技术研究发展中心

Nature of Project:纵向

Project Approval Number:2012AA040406

Date of Project Approval:2012-01-01

Scheduled completion time:2014-12-31

Date of Project Initiation:2012-01-01

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