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论文类型：期刊论文

发表时间：2009-07-01

发表刊物：CHINESE PHYSICS LETTERS

收录刊物：SCIE、ISTIC、Scopus

卷号：26

期号：7

ISSN号：0256-307X

摘要：Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.