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Experimental study on micro-deliquescence ultra-precision polishing with fine water mist for KDP crystal

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Indexed by:期刊论文

Date of Publication:2013-09-23

Journal:Advanced Materials Research

Included Journals:EI、CPCI-S、Scopus

Volume:797

Page Number:423-427

ISSN No.:9783037858257

Key Words:KDP Crystal; Deliquescence; Surface quality; Polishing

Abstract:KDP crystal (Potassium dihydrogen phosphate single crystal) is extremely difficult to obtain flawless surface because of its soft, brittle, and hygroscopic. And a large amount of time has been spend on obtaining flawless surface with ultra-precision machining methods. In order to quickly reduce surface roughness on KDP crystal, a new micro-deliquescence polishing method with fine water mist was proposed, the polishing tool with fine water mist was designed, and the polishing experiment was carried out. The micro-deliquescence polishing with fine water mist can improve the surface quality of KDP crystal quickly, so it is an effective preprocessing before ultra-precision machining.

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