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Indexed by:会议论文

Date of Publication:2006-01-01

Included Journals:CPCI-S

Page Number:669-+

Key Words:diamond films; curve; polishing technology

Abstract:With the fundamental features of natural diamond, the diamond films produced through chemical vapor deposition (CVD) are widely used in the fields of mechanics, electronics and optics. But the diamond-film synthesized under normal conditions is of crystal film with an uneven and rough surface, which restricts the diamond-film from further application: the diamond-film surface needs polishing before practical application. Diamond-film is however very difficult to be polished because of its great hardness, thin thickness, low integral strength, and fragileness. Curving CVD diamond films are of great application value in the field of weaponry. After a discussion on the principles for and characteristics of polishing several typical curving CVD diamond films, the present paper has presented a thermal chemical approach for polishing curving CVD diamond films.