Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2018-01-01

Journal: International Journal of Nanomanufacturing

Included Journals: EI

Volume: 14

Issue: 1

Page Number: 23-33

ISSN: 17469392

Abstract: KDP crystal is a kind of excellent electro-optic material used in many laser facilities, which is also widely acknowledged to be extremely hard to machine. In this work, we developed a process to finish KDP crystal to a precision and clean engineering specimen. A micro-nano water dissolution principle and its planarisation mechanism in the machining process are illustrated, which turns the disadvantaged deliquescence property of KDP crystal into the driving force for ultra-precision polishing of the crystal. Micro emulsion fluid with nano water nuclei can precisely control the material removal and realise the selective polishing, thus forming a super smooth and precise surface. Then a subsequent cleaning process developed specially for this ultra-precision polishing method helps to get rid of the polishing fluid, and finally reduces the residue off the crystal to a clean and tidy surface with 1.964 nm rms roughness for engineering application. Copyright © 2018 Inderscience Enterprises Ltd.