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Optical characterization of hydrogen-free CeO2 doped DLC films deposited by unbalanced magnetron sputtering

Release Time:2023-03-28  Hits:

Date of Publication: 2022-10-07

Journal: APPLIED SURFACE SCIENCE

Institution: 机械工程学院

Volume: 255

Issue: 5

Page Number: 2655-2659

ISSN: 0169-4332

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