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Date of Publication:2022-10-07
Journal:Journal of Semiconductors
Affiliation of Author(s):机械工程学院
Volume:34
Issue:3
Page Number:34001-34005
Pre One:Research progress on ultra-precision machining technologies for soft-brittle crystal materials
Next One:Reviews on high energy fluid jet cleaning technologies with emphasis on applications in remanufacturing [面向再制造的高能束射流清洗技术综述]
