Optical characterization of hydrogen-free CeO2 doped DLC films deposited by unbalanced magnetron sputtering
Release Time:2023-03-28 Hits:
Date of Publication: 2022-10-07
Journal: APPLIED SURFACE SCIENCE
Institution: 机械工程学院
Volume: 255
Issue: 5
Page Number: 2655-2659
ISSN: 0169-4332