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Nanoscale machinability and subsurface damage machined by CMP of soft-brittle CdZnTe crystals

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Date of Publication:2022-10-07

Journal:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Affiliation of Author(s):机械工程学院

Volume:47

Issue:9-12,SI

Page Number:1105-1112

ISSN No.:0268-3768

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