Nanoscale machinability and subsurface damage machined by CMP of soft-brittle CdZnTe crystals
Release Time:2023-03-28 Hits:
Date of Publication: 2022-10-07
Journal: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Institution: 机械工程学院
Volume: 47
Issue: 9-12,SI
Page Number: 1105-1112
ISSN: 0268-3768