Paper Publications
Chemical mechanical polishing and nanomechanics of semiconductor CdZnTe single crystals
- Hits:
- First Author:
zhangzhenyu
- Correspondence Author:
HANG GAO,Jie, Wanqi,Dongming Guo,Renke Kang,liyan
- Date of Publication:
2022-10-05
- Journal:
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Affiliation of Author(s):
机械工程学院
- Document Type:
J
- Volume:
23
- Issue:
10
- ISSN No.:
0268-1242