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Indexed by:期刊论文
Date of Publication:2022-06-29
Journal:材料科学与工程学报
Affiliation of Author(s):机械工程学院
Volume:28
Issue:4
Page Number:477
ISSN No.:1673-2812
Abstract:A new method for evaluating the distribution of abrasive particles in
co-electroplated ultrathin diamond dicing tool was mentioned in this
paper. The processing performance of diamond dicing tool mainly depends
on the distribution of abrasive particles which is hard to be evaluated.
Combined with the development of ultra-thin diamond dicing tool with a
thickness of 0. 01 - 0. 05mm, the effects of coelectroplating parameters
such as abrasive concentration in the solution, cathode current density
and whisking method on the distribution of diamond particles in the
dicing tool were studied. Experimental results show that the abrasive
distribution can be improved effectively with the optimized
co-electroplated parameters of 15g/L abrasive concentration in the
solution, 1A/dm~2cathode current density and 1:10 on-off ratio of
whisking
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