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复合电沉积超薄金刚石切割片磨粒分布的均匀性

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Indexed by:期刊论文

Date of Publication:2022-06-29

Journal:材料科学与工程学报

Affiliation of Author(s):机械工程学院

Volume:28

Issue:4

Page Number:477

ISSN No.:1673-2812

Abstract:A new method for evaluating the distribution of abrasive particles in
   co-electroplated ultrathin diamond dicing tool was mentioned in this
   paper. The processing performance of diamond dicing tool mainly depends
   on the distribution of abrasive particles which is hard to be evaluated.
   Combined with the development of ultra-thin diamond dicing tool with a
   thickness of 0. 01 - 0. 05mm, the effects of coelectroplating parameters
   such as abrasive concentration in the solution, cathode current density
   and whisking method on the distribution of diamond particles in the
   dicing tool were studied. Experimental results show that the abrasive
   distribution can be improved effectively with the optimized
   co-electroplated parameters of 15g/L abrasive concentration in the
   solution, 1A/dm~2cathode current density and 1:10 on-off ratio of
   whisking

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