点击次数：

发表时间：2022-10-09

发表刊物：机械工程学报

所属单位：机械工程学院

期号：12

页面范围：215-220,225

ISSN号：0577-6686

摘要：With a novel abrasive, mechanical polishing and chemical mechanical polishing method, α Al2O3abrasive with diameter of 2-5 μm and self-developed nanosphere polishing slurry with diameter of 5 nm are respectively employed to lap and polish the Cd0.9Zn0.1Te(111), Cd0.96Zn0.04Te(110) and Cd0.96Zn0.04Te(111) single crystalline sheet. For comparison, the traditional machining method of abrasive, mechanical polishing and chemical corrosion is also used to machine the Cd0.96Zn0.04Te(111) single crystalline sheet. The results show that there are a lot of corrosion ditches, embedded hard particles and bigger scratches existing on the surface of Cd0.96Zn0.04Te(111) single crystalline sheet. While, after the polishing of novel method, the surface of Cd0.9Zn0.1Te(111) is very smooth and has no machining defects, that of Cd0.96Zn0.04Te(110) has shallow corrosion pits and slight scratches and no embedded particles, and the surface of Cd0.96Zn0.04Te(111) is also smooth and has only very slight and small scratches. The surface roughness Ra of Cd0.9Zn0.1Te(111), Cd0.96Zn0.04Te(110) and Cd0.96Zn0.04Te(111) single crystalline sheets after chemical mechanical polishing is respectively 2.196 nm, 3.145 nm and 3.499 nm.

备注：新增回溯数据