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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 精密与特种加工教育部重点实验室 副主任； 中国光整加工专业委员会 主任委员； 中国生产工程学会 常务理事； 中国国际磨粒加工技术学会（ICAT）常务理事
性别：男
毕业院校：东北工学院
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械工程学院知方楼7185室
联系方式：0411-84706138 gaohang@dlut.edu.cn
电子邮箱：gaohang@dlut.edu.cn
Nanocutting Process of CdZnTe Single Crystals
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论文类型：期刊论文
发表时间：2009-04-01
发表刊物：MATERIALS AND MANUFACTURING PROCESSES
收录刊物：SCIE、EI
卷号：24
期号：4
页面范围：504-508
ISSN号：1042-6914
关键字：AFM; Al2O3 powder; Berkovich indenter; CdZnTe; Chemical mechanical polishing; Cutting speed; In-situ scanning; Lapping; Nanocutting; Nanoindenter; Nanosphere; Polishing slurry; SiO2; Soft brittle materials; TEM
摘要：(111), (110) Cd0.96Zn0.04Te, and (111) Cd0.9Zn0.1Te single crystals were lapped and polished by Al2O3 powder and SiO2 nanosphere, respectively. The ultrasmooth and damage-free surface with Ra of 1.96nm is achieved. The nanocutting process was conducted by a Berkovich indenter. When a cutting speed is 10m/s and applied load is 10N, the surface roughness Ra of (111) Cd0.96Zn0.04Te is 0.22nm. The results show that lapping, chemical mechanical polishing, and nanocutting composite process is suitable for the machining of soft brittle materials.