Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Main positions: 集成电路学院院长
Title of Paper:ZnO p-n结制备及其电注入发光
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Date of Publication:2006-11-01
Page Number:490-492
Key Words:金属有机化学气相沉积;ZnO薄膜;电致发光;二乙基锌
Abstract:我们采用自行设计的等离子体增强MOCVD系统,利用经特殊设计的反应室,以二乙基锌(DEZn)和O2作为锌源和氧源,分别通过几种途径,获得了p-ZnO薄膜.并且在此基础上,初步制备了ZnO的同质结器件,并观测到了电致发光.
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