Title of Paper:ZnO films growth at different temperature on the substrate of Corning glass by MOCVD

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Date of Publication:2009-08-02

Included Journals:EI、CPCI-S、Scopus

Volume:428-429

Page Number:447-+

Key Words:ZnO; Thin Films; Growth; Glass; MOCVD

Abstract:We deposited ZnO films on Corning glass substrate by metal-organic chemical vapor deposition (MOCVD). We found the diffraction (002) peak at similar to 34.46 degrees, indicating that the ZnO thin films were C-oriented. ZnO films were highly transparent with a transmission ratio larger than 85% in the visible range. The surface morphology of the films was observed by atomic force microscopy (AFM).