Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Academic Titles: 集成电路学院院长
Paper Publications
ZnO films growth at different temperature on the substrate of Corning glass by MOCVD
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Indexed by:Conference Paper
Date of Publication:2009-08-02
Included Journals:Scopus、CPCI-S、EI
Volume:428-429
Page Number:447-+
Key Words:ZnO; Thin Films; Growth; Glass; MOCVD
Abstract:We deposited ZnO films on Corning glass substrate by metal-organic chemical vapor deposition (MOCVD). We found the diffraction (002) peak at similar to 34.46 degrees, indicating that the ZnO thin films were C-oriented. ZnO films were highly transparent with a transmission ratio larger than 85% in the visible range. The surface morphology of the films was observed by atomic force microscopy (AFM).