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一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法

Release Time:2020-08-02  Hits:

First Author: 刘军山

Disigner of the Invention: 徐征,杜立群,张悦,尹鹏和,单晗,赵欣悦,舒振

Authorization Number: ZL2018103 75861.6

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