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Indexed by:期刊论文
Date of Publication:2008-06-15
Journal:发光学报
Included Journals:PKU、ISTIC、CSCD
Volume:29
Issue:3
Page Number:460-464
ISSN No.:1000-7032
Key Words:ZnO∶Ag薄膜;超声喷雾热分解;p型掺杂;Hall效应
Abstract:采用超声喷雾热分解法在石英衬底上以醋酸锌水溶液为前驱体,以硝酸银水溶液为Ag掺杂源,以高纯O2为载气生长了Ag掺杂ZnO(ZnO∶Ag)薄膜.研究了Ag掺杂ZnO薄膜的表面结构、电学和光学性质.结果表明所得ZnO∶Ag薄膜表面结构良好,扫描电子显微镜(SEM)测试表明薄膜表面光滑平整,结构致密均匀;在室温光致发光(PL)光谱中检测到很强的近带边紫外发光峰;透射光谱中观测到非常陡峭的紫外吸收截止边和较高的可见光区透过率,表明薄膜具有较高的晶体质量与较好的光学特性;霍尔效应测试表明,在550 ℃下获得了p型导电的ZnO∶Ag薄膜.
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