原位AlN应力层对硅衬底上PLD法生长氧化钒薄膜性能影响研究
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2015-01-01
Journal: 材料保护
Included Journals: ISTIC、PKU
Volume: 48
Issue: 1
Page Number: 70-73
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2015-01-01
Journal: 材料保护
Included Journals: ISTIC、PKU
Volume: 48
Issue: 1
Page Number: 70-73