Release Time:2022-06-09 Hits:
Date of Publication: 2010-01-01
Journal: Chinese Physics Letters
Institution: 微电子学院
Prev One:Ag掺杂对ZnO薄膜的光电性能影响
Next One:Effects of hydrogen flux on the properties of Al-doped ZnO films sputtered in Ar + H2 ambient at low temperature