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Date of Publication:2022-10-03
Journal:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Affiliation of Author(s):物理学院
Volume:26
Issue:1
Page Number:182-186
ISSN No.:1369-8001
Pre One:Low-temperature growth of high c-orientated crystalline GaN films on amorphous Ni/glass substrates with ECR-PEMOCVD
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