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Realization of controllable etching for ZnO film by NH4Cl aqueous solution and its influence on optical and electrical properties

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Date of Publication:2022-10-08

Journal:APPLIED SURFACE SCIENCE

Volume:253

Issue:11

Page Number:5161-5165

ISSN No.:0169-4332

Pre One:p-type Sb-doped ZnO thin films prepared by metal organic chemical vapor deposition using metal organic dopant

Next One:Realization of nitride-oxide based p-n heterojunctions with the n-VO2/p-GaN/sapphire structure
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