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一种β－碳化硅薄膜的制备方法

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Disigner of the Invention:骆英民,刘维峰,Qin Fuwen,张志坤,边继明

Application Date:2013-07-13

Application Number:ZL2013 1 0293452.9

Authorization Date:2016-01-20

Service Invention or Not:no

Pre One:一种β－碳化硅薄膜的制备方法
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