论文名称：电子束注入对多孔硅吸杂效果的影响
发表刊物：功能材料
所属单位：材料科学与工程学院
期号：8
页面范围：8129-8133
ISSN号：1001-9731
摘要：Study on the effect of porous silicon gettering by electron beam injection was conducted. Preparation of porous silicon was carried out by electrochemical etching in both electrobath. The morphology of porous silicon changed after electron beam injection. Through 3 min gettering treatment, the resistivity changed significantly and greater than the resistivity of the silicon wafers from rapid heat treatment under the same condition, which fully improves that electron beam injection play a dual role of thermal effects and electrical effects, and electron beam injection have a certain effect on the removal of impurities. The time of the electron beam injection shows certain effect on the removal effectiveness of boron.
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发表时间：2014-01-01