论文名称:定向凝固提纯对工业硅杂质及电阻率的影响
论文类型:期刊论文
发表刊物:机械工程材料
卷号:35
期号:3
页面范围:52
ISSN号:1000-3738
摘要:Multicrystal silicon (mc-Si) ingot was prepared using 1101 commercial
silicon as raw material by vacuum induction melting and unidirectional
solidification purification. The chemical composition, microstructure,
resistivity and conductive type of the ingot were analyzed by inductive
coupled plasma-optical emission spectrometer, scanning electron
microscopy, four points resistivity test machine and conductive type
tester. The results show that nearly half of the mc-Si ingot was
purified to 99. 99%, and over 90% of the metal impurities including Fe,
Cu and Ni had been removed. The impurities had been redistributed by the
segregation effect, which led to the break-up of large columnar crystals
growth at 54% height. While the impurity composition and resistivity
changed greatly, and the conductive type changed from P type to N type
备注:新增回溯数据
发表时间:2022-06-29