Segregation and evaporation behaviors of aluminum and calcium in silicon during solidification process induced by electron beam
发表时间：2022-10-08 点击次数：
论文名称：Segregation and evaporation behaviors of aluminum and calcium in silicon during solidification process induced by electron beam
发表刊物：SEMICONDUCTOR SCIENCE AND TECHNOLOGY
所属单位：材料科学与工程学院
卷号：30
期号：3
ISSN号：0268-1242
发表时间：2022-10-08
