SiC sedimentation and carbon migration in mc-Si by election beam melting with slow cooling pattern
发表时间：2022-10-09 点击次数：
论文名称：SiC sedimentation and carbon migration in mc-Si by election beam melting with slow cooling pattern
发表刊物：MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
卷号：53
页面范围：1-7
ISSN号：1369-8001
发表时间：2022-10-08
