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基于2英寸蓝宝石衬底的大面积氮化硼薄膜制备

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Leading Scientist:lianghongwei

Project Participants:xiaxiaochuan,Shen Rensheng,zhangheqiu,柳阳,Luo Yingmin

Supported by:企事业单位委托科技项目

Status:结题

Supported by:中国科学院上海微系统与信息技术研究所

Nature of Project:横向

Date of Project Approval:2017-04-28

Scheduled completion time:2017-06-15

Date of Project Initiation:2016-12-15

Date of Project Completion:2020-06-30

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