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集成电路芯片制造关键工艺虚拟仿真实验项目之刻蚀工艺项目

Release Time:2021-01-29  Hits:

Leading Scientist: 申人升

Project Participants: 梁大成,郭吉洪,王彦霞,Luo Yingmin,刘勐,赵宇,柳阳,夏晓川,汪家奇,梁红伟

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Beijing Runiner Network Technology Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2020-04-29

Scheduled Completion Time: 2021-04-30

Date of Project Initiation: 2020-04-29

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