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反应活性等离子体对功能薄膜的生长行为和薄膜质量的影响

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Leading Scientist:machunyu

Supported by:国家自然科学基金项目

Sub-Class of Project:青年科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:10605009

Date of Project Approval:2006-09-25

Scheduled completion time:2009-12-31

Date of Project Initiation:2007-01-01

Date of Project Completion:2009-12-31

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