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反应活性等离子体对功能薄膜的生长行为和薄膜质量的影响

Release Time:2016-08-09  Hits:

Leading Scientist: 马春雨

Institution: 物理学院

Project Source: 国家自然科学基金项目

Project Level: National level

Sub-Class of Project: 青年科学基金项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 10605009

Date of Project Approval: 2006-09-25

Scheduled Completion Time: 2009-12-31

Date of Project Initiation: 2007-01-01

Date of Project Completion: 2009-12-31

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