Formation mechanism of cobalt silicide on silica by chemical vapor deposition of Co(SiCl3)(CO)4
Release Time:2019-03-13 Hits:
Indexed by: Journal Article
Date of Publication: 2011-01-01
Journal: Phys. Chem. Chem. Phys.
Volume: 13
Issue: 20
Page Number: 9432-9438