点击次数：

发布时间：2019-03-09

论文类型：期刊论文

发表时间：2013-02-01

发表刊物：SENSORS

收录刊物：Scopus、PubMed、EI、SCIE

卷号：13

期号：2

页面范围：1998-2010

ISSN号：1424-8220

关键字：MEMS; freestanding membrane; near-field; thermal radiation

摘要：For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors' thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 mu m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.