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论文类型：期刊论文

发表时间：2022-06-29

发表刊物：机械工程学报

所属单位：机械工程学院

期号：6

页面范围：153-156,162

ISSN号：0577-6686

摘要：Approach of global microvision-based visual servoing for micropositioning is analyzed. Imaging model of G-stereoscopic microscope is derived. According to techniques of image-based visual servoing and stereovision, 3D visual servoing model for micropositioning is built up. The experiments to verify its precision and feasibility are conducted with in-house micromanipulation system and the error factors to affect the precision of micropositioning are analyzed too. The pivotal parameters are acquired through calibration. From the experiment results, the positioning error is about ±(3-4) μm with this visual servoing model for micropositioning. Its precision and stability can be satisfied for micropositioning.

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