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发布时间：2022-07-25

发表时间：2012-01-01

发表刊物：纳米技术与精密工程

卷号：10

期号：5

页面范围：469-473

ISSN号：1672-6030

摘要：A new type of piezoelectric driving MEMS optical scanning mirror was developed. Two pieces of piezoelectric ceramics were attached to the back of the scanning mirror as a driver. Through a simple torsion beam structure, the up and down vibration of the two pieces of piezoelectric ceramics in opposite directions can be converted to the torsional vibration of micro mirror. Based on bulk silicon micromachining technology and micro assembly technology, the device was fabricated. The test shows that, under the atmospheric pressure, the resonance frequency of the scanning micro mirror can be up to 21.9 kHz, and the optical scanning angle can reach 21.8° at 200 V alternate current. Test data show that this device is applicable to such areas as display, laser printing and bar code scanning.

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