TaN单层及Ta/TaN不同调制周期多层薄膜力学性能研究
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2014-01-01
Journal: 稀有金属材料与工程
Included Journals: ISTIC、PKU
Volume: 42
Issue: 2
Page Number: 115-119
Release Time:2019-03-12 Hits:
Indexed by: Journal Article
Date of Publication: 2014-01-01
Journal: 稀有金属材料与工程
Included Journals: ISTIC、PKU
Volume: 42
Issue: 2
Page Number: 115-119