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论文类型：会议论文

发表时间：2013-04-08

收录刊物：EI、CPCI-S

卷号：6

页面范围：551-555

关键字：Ultrasonic vibration; Micro machining; Profile of machined surface; Abrasive particle

摘要：Ultrasonic machining (USM) is known for its ability of processing hard and brittle materials such as silicon, glass and ceramics. Micro USM is used to generate micro features in these materials. In micro USM, material is removed using a tool that impacts abrasive particles into the workpiece, chipping material away from the workpiece. Abrasive particles are distributed randomly in the machining area. Their movement affects the profile of the machined surface. In this study, experiments are carried out to investigate the influence of abrasive particles on the profile of machined surface by micro USM. It was found that machined surface profiles show convex or concave shapes. The profile is affected by amplitude of vibration, diameter of tool and the depth of hole. (C) 2013 The Authors. Published by Elsevier B.V.