点击次数：

论文类型：期刊论文

发表时间：1900-01-01

发表刊物：PHILOSOPHICAL MAGAZINE LETTERS

收录刊物：SCIE、EI、Scopus

卷号：88

期号：8

页面范围：567-574

ISSN号：0950-0839

关键字：La(2)O(3); CeO(2); DLC; residual compressive stress

摘要：Diamond-like carbon (DLC) and seven kinds of La(2)O(3)- and CeO(2)-doped DLC composite nanofilms were deposited by unbalanced magnetron sputtering. Raman spectra show that these deposited films have the obvious characteristics of amorphous DLC films. X-ray photoelectron spectroscopy confirms that the La(2)O(3) and CeO(2) are formed within the DLC films. Combining the C1s spectrum and Raman spectra, the DLC amorphous structure is not changed with the doping of La(2)O(3) and CeO(2). Auger electron spectroscopy exhibits that La, Ce, O and C elements distribute uniformly along the depth direction, and they diffuse into the substrate at the interface between the substrate and film. Residual compressive stress of pure DLC films is 0.9 GPa, and those of La(2)O(3) and CeO(2) doped DLC films are lower than 0.25 GPa. The residual stress of seven kinds of rare earth oxides doped DLC films reduces to lower than 1/3 of that of pure DLC films. When the composite concentration of rare earth oxides is less than or equal to 9%, the residual compressive stress is in the range of 0.01-0.02 GPa, which is 1/90-1/45 of that of pure DLC films, indicating unusual stress behaviour.