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Self-aligned micro contact printing using MEMS

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Indexed by:会议论文

Date of Publication:2009-06-21

Included Journals:EI、Scopus

Page Number:96-99

Abstract:Aligned, multilevel micro contact printing without dedicated printing equipment is demonstrated. Miniature print engines are constructed from silicon parts using MEMS technology. The method is extended to include electrostatically driven patterning of flexible substrates. ?2009 IEEE.

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