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Self-aligned micro contact printing using MEMS

Release Time:2019-03-11  Hits:

Indexed by: Conference Paper

Date of Publication: 2009-06-21

Included Journals: Scopus、EI

Page Number: 96-99

Abstract: Aligned, multilevel micro contact printing without dedicated printing equipment is demonstrated. Miniature print engines are constructed from silicon parts using MEMS technology. The method is extended to include electrostatically driven patterning of flexible substrates. ?2009 IEEE.

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