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Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method. Microsystem Technologies

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Indexed by:期刊论文

Date of Publication:2016-01-01

Journal:Microsystem Technologies

Volume:22

Issue:4

Page Number:721-726

Pre One:Numerical study on the de-molding behavior of 2D PMMA nanochannles during hot embossing process

Next One:Characterization of Parylene C as protective layer on micro-piezoelectric printheads
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