Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2013-03-01

Journal: MICROELECTRONIC ENGINEERING

Included Journals: EI、SCIE

Volume: 103

Page Number: 150-155

ISSN: 0167-9317

Key Words: Ion-focusing electrode; SU-8 polymer; Nano-electrospray ionization (nano-ESI); UV photolithography; Peel off; MEMS

Abstract: A new ion-focusing electrode based on SU-8 polymer is developed in a nano-electrospray ionization (nano-ESI) system to improve the ion transmission efficiency from a spray emitter tip into the counter electrode at atmospheric pressure. The novel SU-8 structure with a three-stepped microhole was fabricated by utilizing micro-electro-mechanical systems (MEMS) technology including three-step UV photolithography and single development. The SU-8 structure was peeled away from the substrate and coated with a metal layer on both side surfaces. Finally, the novel SU-8 electrode was characterized in the nano-ESI system and a 10-fold increase in the electrospray (ES) ion current was observed for an emitter tip voltage of 2600 V, an electrode voltage of 600 V and a distance of 11 mm between the capillary tip and the SU-8 multilayer focusing electrode. (C) 2012 Elsevier B.V. All rights reserved.