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一种带有纳米尺度通道的SU-8胶电液动力射流喷针制造方法

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First Author:zouhelin

Disigner of the Invention:殷志富,孙蕾

Application Number:CN201510209228.6

Authorization Date:2015-04-29

Authorization number:CN104849957A

Pre One:高速二维运动轨迹非接触光电检测新方法
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