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Mechanism of Adhesion Particle Removal Using Supercritical CO2 and Simulation of Deep Groove Cleaning in Semiconductor

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Date of Publication:2025-10-25

Journal:LANGMUIR

Volume:41

Issue:16

Page Number:10590-10604

ISSN No.:0743-7463

Key Words:COLLOIDAL PARTICLES; CONTACT DEFORMATIONS; DETACHMENT; HAMAKER CONSTANTS; SURFACE

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