Effect of nitrogen partial pressure on the piezoresistivity of magnetron sputtered ITO thin films at high temperatures
Release Time:2024-07-17 Hits:
Indexed by: Journal Papers
Document Code: 361581
Date of Publication: 2023-01-15
Journal: APPLIED SURFACE SCIENCE
Volume: 608
ISSN: 0169-4332
Key Words: ELECTRICAL-PROPERTIES; SPECTROSCOPY; STABILITY; THERMOCOUPLES