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集成电路芯片制造关键工艺虚拟仿真实验项目之刻蚀工艺项目

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Leading Scientist:申人升

Project Participants:liangdacheng,guojihong,wangyanxia,Luo Yingmin,liumeng,zhaoyu,liuyang,xiaxiaochuan,wang jiaqi,lianghongwei

Supported by:企事业单位委托科技项目

Status:结题

Supported by:北京润尼尔网络科技有限公司

Nature of Project:横向

Date of Project Approval:2020-04-29

Scheduled completion time:2021-04-30

Date of Project Initiation:2020-04-29

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