Current position: Home >> Scientific Research >> Paper Publications

MOCVD法制备ZnO薄膜的正交试验设计

Release Time:2022-06-21  Hits:

Date of Publication: 2008-01-01

Journal: 半导体光电

Volume: 29

Issue: 5

Page Number: 700-704

ISSN: 1001-5868

Prev One:MOCVD法制备ZnO-GaN组合激光器件

Next One:MOCVD腔体压力对ZnO薄膜生长的影响