Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal-organic chemical vapor deposition
Release Time:2023-12-20 Hits:
Date of Publication: 2022-10-06
Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Institution: 光电工程与仪器科学学院
Volume: 27
Page Number: 841-845
ISSN: 1369-8001