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“集成电路工艺”虚拟实践平台建设与教学实践

Release Time:2024-08-05  Hits:

Indexed by: Journal Papers

Document Code: 374284

Date of Publication: 2023-02-28

Journal: 实验室科学

Volume: 26

Issue: 01

Page Number: 111-114

ISSN: 1672-4305

Key Words: CMOS; experiment teaching; IC manufacturing process; virtual practice platform

CN: 12-1352/N

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