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一种用于提高GaN膜质量的蓝宝石图形衬底及制备方法

Release Time:2022-10-20  Hits:

First Author: 梁红伟

Disigner of the Invention: 杨德超,俞振南,夏晓川,申人升,杜国同

Institution: 微电子学院

Application Number: CN102703974A

Authorization Number: CN201210190964.8

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