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掺杂氧化镓膜的制备方法及掺杂氧化镓膜

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First Author:xiaxiaochuan

Disigner of the Invention:Shen Rensheng,liuyang,lianghongwei,duguotong,hulizhong

Affilication of Author(s):微电子学院

Application Number:CN103469299A

Authorization number:CN201310398997.6

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